When evaluating shrinking metal linewidths in advanced semiconductor devices, bulk resistivity is not the sole materials property for deriving electrical resistance. At smaller line dimensions, local ...
Transparent conductive thin films are crucial in various semiconductor devices, including solar cells, liquid crystal displays (LCDs), light-emitting diodes (LEDs), and sensors. Indium tin oxide (ITO) ...
With the development of novel titanium-silicidation techniques, imec Ph.D. student Hao Yu presents improved source/drain contact schemes which help solving the contact resistance challenge for ...
The majority of metal traces used to produce electrical connections in semiconductor devices begin life as blanket metal films that are later patterned and etched to create conductive connections ...
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